Dual-Target RF Magnetron Sputtering Vacuum PVD Coating Machine for Semiconductor Films

Product Description

Dual-Target RF Magnetron Sputtering Vacuum PVD Coating Machine for Semiconductor Films Product Description
Dual-target RF magnetron sputtering coater introduction:
Dual-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with two 300W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.Dual-target RF magnetron sputtering coater application:This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Product Parameters
Dual-target DC magnetron sputtering coater technical parameters:

Sample Stage	Size	φ185mm	Temperature control accuracy	±1ºC
	Heating temperature	Max 500ºC	Rotate speed	1-20rpm adjustable
Magnetron Sputtering target head	Quantity	2"×2 (1",2" optional)	Water chiller	Circulating water chiller with flow rate of 10L/min
	Cooling mode	Water cooling
Vacuum chamber	Chamber size	φ300mm×300mm	Watch window	φ100mm
	Chamber material	Stainless steel	Opening mode	Top cover open
Mass flowmeter	2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)
Vacuum system	Model	CY-GZK103-A	Pumping interface	KF40
	Molecular pump	CY-600	Exhaust interface	KF16
	Backing pump	rotary vane pump	Vacuum measurement	Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa	Power supply	AC;220V 50/60Hz
	Pumping rate	Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	RF power supply×2	Max output power	RF 300 W
Other parameters	Supply voltage	AC220V,50Hz	Overall size	600mm×650mm×1280mm
	Total power	2.5KW	Total Weight	About 300kg

Company Profile

Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
Thanks for your efforts to make the world bettter!
Any questions about our spin coater, please contact us

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