Basic Info.
Exhauster Method
Positive Displacement Pump
Work Function
Pre-Suction Pump
Transport Package
Export Standard Packing
Specification
CE, GC, SGS, BV, ISO Certification
Production Capacity
1000 Sets/Month
Packaging & Delivery
Package Size
100.00cm * 50.00cm * 50.00cm
Package Gross Weight
385.000kg
Product Description
DS Series Dry Screw Vacuum Pump
Features
1.Exhaust Path Is Short, Reduce The Deposition Of Reactants.
Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.
2.The Optimal Linear Sealing, The Pump Performance.
Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.
3.Simple Structure, Low Fault Rate And Easy Maintenance
Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.
4.Microcomputer Operation, Remote Monitoring, Considerate Protection
Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.
DS Vacuum Pump Speed Curve
Advantages 1.Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.
2.Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.
3.Catch the power connector, safe and convenient.
4.The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.
5.The control signals and communication signal interface, remote monitoring was carried out on the vacuum.
Application 1.The health care industry.
2.Lighting industry.
3.A variety of analytical instruments.
4.Electronics, semiconductor industry.
5.The power industry.
6.Refrigeration industry.
Technical Prameters
Type | Unit | DS180 | DS250 | DS360 | DS540 | DS720 |
50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz |
Pumping speed | m3/hr | 180 | 216 | 250 | 300 | 360 | 432 | 540 | 650 | 720 | 850 |
L/min | 3000 | 3600 | 4200 | 5000 | 6600 | 7920 | 9000 | 10800 | 12000 | 14400 |
L/S | 50 | 60 | 70 | 84 | 110 | 132 | 150 | 180 | 200 | 240 |
Extreme pressure | mbar | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 |
Torr | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 |
Pa | 2 | 1 | 2 | 1 | 2 | 1 | 2 | 1 | 2 | 1 |
Power | kW | 7.5 | 7.5 | 7.5 | 7.5 | 11 | 15 | 18.5 | 18.5 | 22 | 22 |
Speed | RPM | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 |
Inlet diameter | mm | 65 | 80 | 100 | 150 | 150 |
Outlet diameter | mm | 40 | 40 | 65 | 65 | 65 |
Gear chamber oil content | L | 0.85 | 0.85 | 1.40 | 2.00 | 2.00 |
Cooling water | L/min | 2.50 | 2.60 | 2.80 | 3.00 | 4.00 |
gal/min | 0.67 | 0.70 | 0.75 | 0.80 | 1.07 |
Weight | Kg | 295 | 350 | 480 | 520 | 680 |
Noise level | dB(A) | 75 | 78 | 81 | 85 | 86 |
Room temp | ºC | 5-40 |
Maximum permissible humidity | 90% |
Type | Unit | DSV250 | DSV360 | DSV540 | DSV720 | DSV1200 |
50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz |
Pumping speed | m3/hr | 250 | 300 | 400 | 480 | 580 | 700 | 800 | 960 | 1200 | 1440 |
L/min | 4200 | 5000 | 6600 | 7920 | 9600 | 11500 | 13200 | 15800 | 19800 | 23700 |
L/S | 70 | 84 | 110 | 132 | 160 | 192 | 220 | 264 | 330 | 396 |
Extreme pressure | mbar | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 | 0.02 | 0.01 |
Torr | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 | 0.015 | 0.0075 |
Pa | 2 | 1 | 2 | 1 | 2 | 1 | 2 | 1 | 2 | 1 |
Power | kW | 5.5 | 7.5 | 7.5 | 11 | 11 | 15 | 15 | 18.5 | 22 | 22 |
Speed | RPM | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 | 2900 | 3550 |
Inlet diameter | mm | 65 | 80 | 100 | 150 | 150 |
Outlet diameter | mm | 40 | 40 | 65 | 65 | 65 |
Gear chamber oil content | L | 0.85 | 0.85 | 1.4 | 2 | 2 |
Cooling water | L/min | 2.50 | 2.50 | 2.60 | 2.80 | 3.50 |
gal/min | 0.67 | 0.67 | 0.70 | 0.75 | 0.94 |
Weight | Kg | 295 | 350 | 480 | 520 | 680 |
Noise level | dB(A) | 72 | 73 | 75 | 78 | 80 |
Room temp | ºC | 5-40 |
Maximum permissible humidity | 90% |
Note:
1.The amount of oil listed above is for reference only and is usually fluoride and mineral oil. The device is equipped with pump oil and grease oil.
2.The amount of cooling water is based on the ambient temperature of 30ºC and the cooling water inlet temperature of 20ºC . The use of circulating water will vary, and the water pressure will be 0.15-0.2Mpa.
*) Specifications are subject to change without prior notice
About DENAIR
FAQ
Q1: Are you factory or trade company?
A1: We are factory.
Q2: What the exactly address of your factory?
A2: Our company is located in No. 6767, Tingfeng Rd. Jinshan District, Shanghai 201502, China
And our factory is located in No.386,YangzhuangBang Street,Pingxing Rd.,Xindai Town,Pinghu,Zhejiang Province, China
Q3: Warranty terms of your machine?
A3: Two years warranty for the machine and technical support according to your needs.
Q4: Will you provide some spare parts of the machines?
A4: Yes, of course.
Q5: How long will you take to arrange production?
A5: 380V 50HZ we can delivery the goods within 10 days. Other electricity or other color we will delivery within 22 days
Q6: Can you accept OEM orders?
A6: Yes, with professional design team, OEM orders are highly welcome.
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