Photoresist CUP Cleaning Machine

Product Details

Product Description

Product Description
Wafer specification:
2-8 inches, single or double cassette type
Main materials:
Metal frame + SUS304 shell, channel body material SUS316
Process tank function:
Circulating filtration + heating
Basic process flow:
Reagent solution tank → Acetone → Isopropyl Alcohol → QDR
Equipment type:
Manual/Semi-automatic/Automatic (customized)
Footprint: 1800 (W) x 1300 (D) x 2000 (H) mm (customized)

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