Product Details
Product Description
Product Description
1.Main specifications of the equipment
Type
| Items
| 0thers
|
Power
| 3 phase 220V,50Hz
|
|
Equipment size
| 1800L x 1550W x 2850H(except Elec./AIR box)
|
|
Control
| Touch screen &PLC control
|
|
AIR pressure
| 5~6 Kg/cm²Max.
|
|
Plate size
| POL
| φ384 x φ1140 x 55t[SUS410]
|
|
Bot tom plate par ts
| R.P.M
| Max.46 R.P.M(inver ter drive)
|
|
Motor
| 7.5Kw x 4P
|
|
Method
| worm gear (Dec.rate 1/25)box drive
|
|
Top plate par ts
| R.P.M
| Max.20 R.P.M(inverter dr ive)
|
|
Motor
| 3.7Kw x 4P
|
|
Method
| worm gear(Dec.rate 1/60)box drive
|
|
Top air pres.
cylinder
| φ 180x 550st(low friction cylinder)
|
|
Work size setting
| sunar scale unit control(LAPPING)
|
|
Carrier par ts
| Carrier size
| P.C.D φ423.34 [Dp=12/Z=200]
|
|
Inserting amount
| 5EA
|
|
WORK SIZE
|
|
|
Internal gear
| P.C.D φ1185.34 [Dp=12/Z=560]
|
|
R.P.M
| Max.23 R.P.M(servo motor
dr ive)
|
Motor
| HC-SFS352[3.5Kw]
|
Method
| planet gear dec.dr ive (dec.rate 1/14)
|
Up-Down
| geared motor 0.4Kw.1/60
|
35st
|
sun gear
| P.C.D φ338.67 [Dp=12/Z=160]
|
|
R.P.M
| Max.29 R.P.M(servo dr ive)
| motor
|
|
Motor
| HC-SFS152[1.5Kw]
|
|
Method
| planet gear dec,dr ive (dec.rate 1/60)
|
|
Up-Down
| manual operation
|
20st
|
※ Above specification can be changed for the better per formance at any time.
2.Basic things of the equipment
1)Basic concept of the equipment
This equipment uses 4-WAY mode and gives the movement from the 4 mode to the work.
The top and bottom plates,sun gear,and internal gear do the rotation independent ly and it can process both side of the work,so the process stress is small and improves parallel and plane diagram of the work.
4-WAY mode does the planet movement on the plate in full,so the one side wear can be reduced and it is possible to adjust the range of the air pressure using the electric regulator.
With the 4-WAY movement and using accurately calculated gear ratio,the problem that happens to the carrier when keeping and maintaining the work can be reduced.
Through this,the thin carrier can be used and the process of the thin work and longer lifespan of the carrier are possible.
2)Development of the equipment and its character istics
CMT has been developing the precision plane gr inder which improved the basic characteristics of the thin film products.
Especially,we are trying to study and develop the high precision planar ization that can process the crystal,oxide,silicon wafer,thin film glass,etc.thin and securely at the section and both side gr inding device.
0ur both side LAP/POL MACHINE is designed and produced to show its efficiency considering its characteristics as the machine tool.
Meant ime,Europe or Japan made machines have been introduced to Korea but because of their high price it has been hard to invest and some Korean companies introduced but there has been some problems due to their poor efficiency.
In producing this both side LAP/POL MACHINE,we'd Iike to give you some help.Fur thermore, we will try hard to improve our technical skills and improvement of the product.
☑ Cont inuously var iable transmission of LAP/POL top/bottom plate
Top/bot tom plates work separately and they do continuously variable transmit within the Max. 20 R.P.M(top/bottom plates)range through each inver ter drive.The touch screen shows the current R.P.M of the plate.
☑ Cont inuously var iable transmission of internal and sun gears
INTERNAL/SUN gears can do the individual CVT within the internal Gear Max.23 R.P.M/Sun Gear 29 R.P.M range thr ough the servo motor and rotate the gr inding direction of the carrier and work.
☑ Working processor can be applied using the touch screen
To optimize the working condition of each models,it uses the touch screen and inputs and process the pressure,top-bot tom plates rotation,and sun gear rotation data in each step.
☑ Rich opt ion can be applied
You can add var ious options according to the working condition and objects.
a.Back pressure system
It is designed to add weight and time freely installing the electric regulator to the machine.
b.Special plate applied
You can use var ious type plates according to the working characteristics. (FC,FCD,SUS,copper,Sn,kemet,ceramic,etc.)
c.Size measur ing device
Attaching the liner scale,the user can do the high precision management and process in μM(Micron).
3)Components and names of the equipment
A)Bottom frame
It is designed to weigh the weight equally locating ribs on the bottom using FC30(GC300). The side where the drive parts such as the motor and decelerator are assembled is machine processed to prevent the torsion when applying the bol ts.It is heat treated to remove the inside heat stress while casting and inside stress which happens dur ing the process and it is the semi-permanent structure to sof ten the texture through anneal ing and short treatment.
B)Bot tom dr ive par t
To improve the durability and accur acy,special heat treatment and grinding are done using carbon steel and cast iron for the main axis and housing type.For the high precision bear ings and bottom plate drive area,the sliding bearing(turciate method)is used and improved the vibration and noise of the equipment.It has a structure that can endure the weight of the plate and glass and it is compact through unifying each drive part to the gear box type(topside of the worm decelerator).
Var ious gears and screws are gr inded after the heat treatment and its high hardness gives the superb abrasion resistance.
Sun gear and internal gear have the Up-down structure and give the maximum rang
C)Top par t
Using the low friction product,the top part cylinder's stroke and trust are stable and it also has a falling down protection device,so it is safe for the workers.
There are fastening bolts to set the top/bottom plate movement and the slurry can supply evenly through the distributor.
The driver adapter key that dr ives the top plate uses tool steel,so its abrasion and corrosion resistance are excellent.To make the maintenance easy,it is designed to rotate the top part.
Installing the taper roller bear ings symmetrically on the top part,it can resist the weight from the vertical and horizontal directions.
In this top part frame of this equipment,the ③axis turns based on the ④axis for the maintenance.For this,separate the top part by releasing the bolts of the O,then place the main cylinder up and rotate the ③axis.It is dangerous to do the maintenance rotating the axis without separating the C top plate,so please check whether the main cyl inder is up or not before the work.
D)LAP/POL plate
The mater ial of the plate is ductile cast iron(FCD450)with special heat treatment,so its wear and refractory are superb and long life time is expected with its small change for the fast rotation of the top/bot tom plates.
The crystal carrier uses cast iron for the Lap plate and diamond pallet attached carrier for the Pol plate,so it controls the plate levelness.
Processing the top/bot tom slots at the LAP plate,it is easy to release the slurry and attaching cerium at the Pol plate,it has fast gr inding power and long life.
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