Item | SiC N-Type Epi Wafer | SiC P-Type Epi Wafer |
Size | 3inch/ 4inch/ 6inch | 3inch/ 4inch/ 6inch |
Poly-type | 4H | 4H |
Dopant | Nitrogen | Aluminum |
Doping Density | ND-NA | NA-ND |
Silicon Surface | 9E14~1E19cm-3 | 9E14~1E19cm-3 |
Tolerance | ±15% | ±50% |
Uniformity | ≤10% | ≤20% |
Thickness | 0.2~50μm | |
Tolerance | ±10% | ±10% |
Uniformity | ≤10% | ≤10% |