| Item | SiC N-Type Epi Wafer | SiC P-Type Epi Wafer |
| Size | 3inch/ 4inch/ 6inch | 3inch/ 4inch/ 6inch |
| Poly-type | 4H | 4H |
| Dopant | Nitrogen | Aluminum |
| Doping Density | ND-NA | NA-ND |
| Silicon Surface | 9E14~1E19cm-3 | 9E14~1E19cm-3 |
| Tolerance | ±15% | ±50% |
| Uniformity | ≤10% | ≤20% |
| Thickness | 0.2~50μm | |
| Tolerance | ±10% | ±10% |
| Uniformity | ≤10% | ≤10% |
